Fabrication of ultrathin metallic membranes by sputter deposition and chemical vapor deposition

Research output: Contribution to conferencePaper

Original languageEnglish
Publication statusPublished - Jul 10 1996
EventThe BOC Technical Center - Murray Hill, NJ
Duration: Jul 10 1996 → …

Conference

ConferenceThe BOC Technical Center
CityMurray Hill, NJ
Period7/10/96 → …

Cite this

Lin, J. Y. S. (1996). Fabrication of ultrathin metallic membranes by sputter deposition and chemical vapor deposition. Paper presented at The BOC Technical Center, Murray Hill, NJ, .