Fabrication of ultrathin metallic membranes by sputter deposition and chemical vapor deposition

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
StatePublished - Jul 10 1996
EventThe BOC Technical Center - Murray Hill, NJ
Duration: Jul 10 1996 → …

Conference

ConferenceThe BOC Technical Center
CityMurray Hill, NJ
Period7/10/96 → …

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