TY - JOUR
T1 - Fabrication of thin metallic membranes by MOCVD and sputtering
AU - Xomeritakis, George
AU - Lin, Y. S.
N1 - Funding Information:
This work was financially supported by the National Science Foundation (CTS-9216164 and CTS-9500067) and the Petroleum Research Fund adminis- tered by the American Chemical Society. The authors are grateful to Dr. Jonghee Han of our laboratory and Dr. Jenny Lian of Department of Materials Science and Engineering at the University of Cincinnati for their assistance is SEM/EDS analysis.
PY - 1997/10/1
Y1 - 1997/10/1
N2 - Thin (0.1-1.5 μm) Pd and Pd/Ag alloy membranes have been prepared on porous ceramic substrates consisting of a macroporous α-Al2O3 disk coated with a sol-gel derived, mesoporous γ-Al2O3 top layer. Metallorganic chemical vapor deposition (MOCVD) and magnetron sputtering were used to coat the thin metallic membranes employing Pd(II) acetylacetonate and a 75% Pd-25% Ag alloy target, respectively. The gas transport properties of the thin metallic membranes were determined by multicomponent permeation experiments with He, H2 and Ar at 25-300°C and 1 arm total pressure. The H2 permeance and H2: He selectivity were in the range 1.0-2.0 x 10-7 mol m-2s-1Pa-1 and 30-200 at 300°C, respectively. The dependence of H2 permeation rates on membrane thickness and temperature suggest that surface reaction steps are rate-limiting for H2 transport through the thin, ceramic-supported metallic membranes made by MOCVD and sputtering.
AB - Thin (0.1-1.5 μm) Pd and Pd/Ag alloy membranes have been prepared on porous ceramic substrates consisting of a macroporous α-Al2O3 disk coated with a sol-gel derived, mesoporous γ-Al2O3 top layer. Metallorganic chemical vapor deposition (MOCVD) and magnetron sputtering were used to coat the thin metallic membranes employing Pd(II) acetylacetonate and a 75% Pd-25% Ag alloy target, respectively. The gas transport properties of the thin metallic membranes were determined by multicomponent permeation experiments with He, H2 and Ar at 25-300°C and 1 arm total pressure. The H2 permeance and H2: He selectivity were in the range 1.0-2.0 x 10-7 mol m-2s-1Pa-1 and 30-200 at 300°C, respectively. The dependence of H2 permeation rates on membrane thickness and temperature suggest that surface reaction steps are rate-limiting for H2 transport through the thin, ceramic-supported metallic membranes made by MOCVD and sputtering.
KW - Chemical vapor deposition
KW - Gas separations
KW - Magnetron sputtering
KW - Metallic membranes
UR - http://www.scopus.com/inward/record.url?scp=0031258863&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031258863&partnerID=8YFLogxK
U2 - 10.1016/S0376-7388(97)00084-7
DO - 10.1016/S0376-7388(97)00084-7
M3 - Article
AN - SCOPUS:0031258863
SN - 0376-7388
VL - 133
SP - 217
EP - 230
JO - Journal of Membrane Science
JF - Journal of Membrane Science
IS - 2
ER -