Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales

Jingwei Bai, Deqiang Wang, Sung Wook Nam, Hongbo Peng, Robert Bruce, Lynn Gignac, Markus Brink, Ernst Kratschmer, Stephen Rossnagel, Phil Waggoner, Kathleen Reuter, Chao Wang, Yann Astier, Venkat Balagurusamy, Binquan Luan, Young Kwark, Eric Joseph, Mike Guillorn, Stanislav Polonsky, Ajay RoyyuruS. Papa Rao, Gustavo Stolovitzky

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