@inproceedings{7469cbe019c6460db69c569b360622ca,
title = "Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement",
abstract = "A unique structure for chronically implantable cortical electrodes using polyimide polymer was devised, which provides both flexibility between brain tissues and skull and stiffness for easy insertion. The fabricated implants are tri-shanks with 5 recording sites (20x20 μm) and 2 vias per electrode of 40x40 μm. Each recording site was connected to the external circuitry via a 15-channel connector, which is especially designed to facilitate processing of neural signals to the external circuitry. Measured impedance values are in ∼2 Mohm at 1 KHz. For a 5 μm thick silicon backbone electrode, the stiffness was improved 10 times larger than that of the electrode without silicon backbone layer. Stiff electrodes with 5 μm and 10 μm thick backbone silicon penetrated pia of rat without buckling.",
keywords = "Circuits, Connectors, Electrodes, Fabrication, Implants, Polyimides, Polymers, Silicon, Skull, Spine",
author = "K. Lee and A. Singh and H. Zhu and G. Coryell and B. Olson and B. Kim and Gregory Raupp and J. He",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1216992",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1221--1224",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}