Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement

K. Lee, A. Singh, H. Zhu, G. Coryell, B. Olson, B. Kim, Gregory Raupp, J. He

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A unique structure for chronically implantable cortical electrodes using polyimide polymer was devised, which provides both flexibility between brain tissues and skull and stiffness for easy insertion. The fabricated implants are tri-shanks with 5 recording sites (20x20 μm) and 2 vias per electrode of 40x40 μm. Each recording site was connected to the external circuitry via a 15-channel connector, which is especially designed to facilitate processing of neural signals to the external circuitry. Measured impedance values are in ∼2 Mohm at 1 KHz. For a 5 μm thick silicon backbone electrode, the stiffness was improved 10 times larger than that of the electrode without silicon backbone layer. Stiff electrodes with 5 μm and 10 μm thick backbone silicon penetrated pia of rat without buckling.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1221-1224
Number of pages4
Volume2
ISBN (Print)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Fingerprint

Polyimides
Fabrication
Electrodes
Silicon
Stiffness
Buckling
Rats
Brain
Tissue
Polymers
Processing

Keywords

  • Circuits
  • Connectors
  • Electrodes
  • Fabrication
  • Implants
  • Polyimides
  • Polymers
  • Silicon
  • Skull
  • Spine

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Lee, K., Singh, A., Zhu, H., Coryell, G., Olson, B., Kim, B., ... He, J. (2003). Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 2, pp. 1221-1224). [1216992] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216992

Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement. / Lee, K.; Singh, A.; Zhu, H.; Coryell, G.; Olson, B.; Kim, B.; Raupp, Gregory; He, J.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. p. 1221-1224 1216992.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, K, Singh, A, Zhu, H, Coryell, G, Olson, B, Kim, B, Raupp, G & He, J 2003, Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 2, 1216992, Institute of Electrical and Electronics Engineers Inc., pp. 1221-1224, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1216992
Lee K, Singh A, Zhu H, Coryell G, Olson B, Kim B et al. Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1221-1224. 1216992 https://doi.org/10.1109/SENSOR.2003.1216992
Lee, K. ; Singh, A. ; Zhu, H. ; Coryell, G. ; Olson, B. ; Kim, B. ; Raupp, Gregory ; He, J. / Fabrication of implantable polyimide based neural implants with flexible regions to accommodate micromovement. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1221-1224
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