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Fabrication of cylindrical nanopores and nanopore arrays in silicon-on-insulator substrates
Leo Petrossian, Seth J. Wilk, Punarvasu Joshi, Sahar Hihath, Stephen Goodnick, Trevor Thornton
- Nano-Electronics, Arizona Institute of (AINE)
- Materials Science and Engineering
- Adaptive Neural Systems, Center for (ANS)
- Single Molecule Biophysics, Center for (SMB)
- Electrical Engineering
- Solid State Electronics Research Center (CSSER)
- Engineering, Ira A. Fulton Schools of (IAFSE)
- Knowledge Enterprise (KE)
- Biodesign Institute
- Connection One (C1)
- Cognitive Ubiquitous Computing, Center for (CUbiC)
- Computational Nanoscience, Center for (CCN)
- Electrical, Computer, and Energy Engineering, School of (IAFSE-ECEE)
Research output: Contribution to journal › Article › peer-review
18
Scopus
citations