Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

Chao Wang, Tianling Ren, Zheyao Wang, Yiping Zhu, Ningxin Zhang, Litian Liu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO 2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

Original languageEnglish (US)
Pages (from-to)3-11
Number of pages9
JournalIntegrated Ferroelectrics
Volume88
Issue number1
DOIs
StatePublished - 2007
Externally publishedYes

Fingerprint

Fabrication
Electrodes
fabrication
electrodes
Capacitance
capacitance
curves
Thick films
Sol-gel process
Ferroelectric materials
thick films
titanium
Titanium
gels
Annealing
coatings
Coatings
annealing
Electric potential
electric potential

Keywords

  • In-plane polarization
  • Interdigital electrode
  • Lead zirconate titanate
  • PZT thick film

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics
  • Control and Systems Engineering

Cite this

Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes. / Wang, Chao; Ren, Tianling; Wang, Zheyao; Zhu, Yiping; Zhang, Ningxin; Liu, Litian.

In: Integrated Ferroelectrics, Vol. 88, No. 1, 2007, p. 3-11.

Research output: Contribution to journalArticle

Wang, Chao ; Ren, Tianling ; Wang, Zheyao ; Zhu, Yiping ; Zhang, Ningxin ; Liu, Litian. / Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes. In: Integrated Ferroelectrics. 2007 ; Vol. 88, No. 1. pp. 3-11.
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AU - Liu, Litian

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