Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

Chao Wang, Tianling Ren, Zheyao Wang, Yiping Zhu, Ningxin Zhang, Litian Liu

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO 2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

Original languageEnglish (US)
Pages (from-to)3-11
Number of pages9
JournalIntegrated Ferroelectrics
Volume88
Issue number1
DOIs
StatePublished - Dec 1 2007
Externally publishedYes

Keywords

  • In-plane polarization
  • Interdigital electrode
  • Lead zirconate titanate
  • PZT thick film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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