Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

Chao Wang; Tianling Ren; Zheyao Wang; Yiping Zhu; Ningxin Zhang; Litian Liu

doi:10.1080/10584580601098498

Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

Chao Wang, Tianling Ren, Zheyao Wang, Yiping Zhu, Ningxin Zhang, Litian Liu

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

In this paper, Pb(Zr_0.53,Ti_0.47)O₃ films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO ₂/SiO₂/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

Original language	English (US)
Pages (from-to)	3-11
Number of pages	9
Journal	Integrated Ferroelectrics
Volume	88
Issue number	1
DOIs	https://doi.org/10.1080/10584580601098498
State	Published - 2007
Externally published	Yes

Keywords

In-plane polarization
Interdigital electrode
Lead zirconate titanate
PZT thick film

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1080/10584580601098498

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@article{e0291ac632aa467f91641713c1297ad6,

title = "Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes",

abstract = "In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO 2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.",

keywords = "In-plane polarization, Interdigital electrode, Lead zirconate titanate, PZT thick film",

author = "Chao Wang and Tianling Ren and Zheyao Wang and Yiping Zhu and Ningxin Zhang and Litian Liu",

note = "Funding Information: is supported by National Natural Science Foundation of China (90407023), and “863” Program of China (2004AA404240).",

year = "2007",

doi = "10.1080/10584580601098498",

language = "English (US)",

volume = "88",

pages = "3--11",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1",

}

TY - JOUR

T1 - Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

AU - Wang, Chao

AU - Ren, Tianling

AU - Wang, Zheyao

AU - Zhu, Yiping

AU - Zhang, Ningxin

AU - Liu, Litian

N1 - Funding Information: is supported by National Natural Science Foundation of China (90407023), and “863” Program of China (2004AA404240).

PY - 2007

Y1 - 2007

N2 - In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO 2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

AB - In this paper, Pb(Zr0.53,Ti0.47)O3 films are deposited on titania by sol-gel method, and PZT films of -4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO 2/SiO2/Si structure is proposed, and the PZT films are in-plane polarized by top Inter Digital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

KW - In-plane polarization

KW - Interdigital electrode

KW - Lead zirconate titanate

KW - PZT thick film

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U2 - 10.1080/10584580601098498

DO - 10.1080/10584580601098498

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SN - 1058-4587

VL - 88

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EP - 11

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1

ER -

Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes

Abstract

Keywords

ASJC Scopus subject areas

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