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Dive into the research topics of 'Fabrication and characterization of C implantation standards for Si<sub>1-x-y</sub>Ge<sub>x</sub>C<sub>y</sub> alloys'. Together they form a unique fingerprint.
Physics & Astronomy
germanium
implantation
carbon
fabrication
characterization
germanium alloys
silicon alloys
sensitivity
secondary ion mass spectrometry
backscattering
electron microscopy
high resolution
silicon
spectroscopy
Chemical Compounds
Carbon
Fabrication
Germanium alloys
Rutherford backscattering spectroscopy
High resolution electron microscopy
Secondary ion mass spectrometry
Silicon alloys
Silicon
Chemical analysis
Engineering & Materials Science
Carbon
Fabrication
Germanium alloys
Rutherford backscattering spectroscopy
Secondary ion mass spectrometry
Silicon alloys
Characterization (materials science)
Silicon
Chemical analysis