Exploring polysilicon micromotors for data storage micro disks

N. J. Mourlas, K. C. Stark, M. Mehregany, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Fingerprint

Dive into the research topics of 'Exploring polysilicon micromotors for data storage micro disks'. Together they form a unique fingerprint.

Engineering & Materials Science