Exploiting transport of guest metal ions in a host ionic crystal lattice for nanofabrication: Cu nanopatterning with Ag2S

Keng H. Hsu, Peter L. Schultz, Placid M. Ferreira, Nicholas X. Fang

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

In this letter we demonstrate the possibility of using the solid ionic conductor Ag2S for the fabrication of sub-100 nnm features in a Cu film. We also evaluate the physical properties of the Cu-Ag2S interface through an electroimpedance spectroscopy study. Cu meander lines of 60 nm in width were obtained and the screening length and the surface adatom concentration of Cu on the interface were also evaluated to be 20 nm and 10 12/cm2 respectively.

Original languageEnglish (US)
Pages (from-to)863-868
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Volume97
Issue number4
DOIs
StatePublished - Dec 1 2009

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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