Experimental verification of theoretical cross sections for FIB-PIXE

Kenneth L. Streib, Terry Alford, James W. Mayer

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

X-ray production cross sections were found for films of Cr, Cu, Ge, Ag, W and Au, using incident H+ and Be+ ions at energies from 300 keV to 3.5 MeV. These experimental cross section results were compared with the cross section results obtained using software which calculates inner shell ionization and X-ray production cross sections. The software uses the ECPSSR-UA approach to finding X-ray production cross sections. This program was found to be useful for predicting cross sections for H+ and Be+ ions at the energies in this study. The software was then used to predict results for Li+, Be+ and B+ ions at 280 keV, energies available in the Arizona State University focused ion beam laboratory.

Original languageEnglish (US)
Pages (from-to)92-94
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume249
Issue number1-2 SPEC. ISS.
DOIs
StatePublished - Aug 2006

Keywords

  • FIB
  • FIB-PIXE
  • Focused ion beam
  • PIXE
  • Particle induced X-ray emission
  • X-ray emission

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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