Experimental technique and a model for studying the operation of harmonic side-drive micromotors

Vijayakumar R. Dhuler, Mehran Mehregany, Stephen Phillips

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

This paper studies the operation of harmonic side-drive micromotors through gear ratio measurements and modeling of the micromotor dynamics. A simple experiment in which the wobble micromotor gear ratio is measured as a function of excitation voltage and pattern is used to characterize micromotor operation. This experiment in conjunction with the micromotor dynamic model presented can be used to study friction at the micromotor bearing and bushing contacts by fitting the model to the experiment. The model is based on a detailed analysis of the electrostatic and friction forces acting on the bearing and bushing contacts. In particular, the model accounts for sliding and rolling of the rotor on the bearing, and sliding of the rotor on the bushing. The model can be used in conjunction with the experiment to estimate the bearing coefficient of friction and the bushing friction force. For micromotor operation in nitrogen gas, a polysilicon on polysilicon coefficient of friction of 0.36-0.4 is estimated. The bushing frictional force is found to consist of a constant term and a term that depends on the square of the excitation voltage.

Original languageEnglish (US)
Pages (from-to)1977-1984
Number of pages8
JournalIEEE Transactions on Electron Devices
Volume40
Issue number11
DOIs
StatePublished - Nov 1993
Externally publishedYes

Fingerprint

micromotors
Micromotors
bushings
Bearings (structural)
Bushings
harmonics
Friction
friction
Polysilicon
coefficient of friction
rotors
Gears
sliding
Rotors
Experiments
Electric potential
electric potential
dynamic models
excitation
Electrostatics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Experimental technique and a model for studying the operation of harmonic side-drive micromotors. / Dhuler, Vijayakumar R.; Mehregany, Mehran; Phillips, Stephen.

In: IEEE Transactions on Electron Devices, Vol. 40, No. 11, 11.1993, p. 1977-1984.

Research output: Contribution to journalArticle

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