Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Xiaotun Qiu, Rui Tang, Jie Zhu, Jonathon Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu

Research output: Contribution to journalLetter

33 Scopus citations

Abstract

Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.

Original languageEnglish (US)
Pages (from-to)381-384
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume147
Issue number2
DOIs
StatePublished - Jun 3 2010

Keywords

  • Film bulk acoustic-wave resonator
  • Mass loading
  • Power law
  • Relative humidity
  • ZnO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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