Ex situ and in situ methods for oxide and carbon removal from AlN and GaN surfaces

Sean W. King, Laura L. Smith, John P. Barnak, Ja Hum Ku, Jim A. Christman, Mark C. Benjamin, Michael D. Bremser, Robert Nemanich, Robert F. Davis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

23 Scopus citations

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Chemical Compounds

Engineering & Materials Science