Evaluation of metal oxides prepared by reactive sputtering as carrier-selective contacts for crystalline silicon solar cells

Mathieu Boccard, Laura Ding, Priyaranga Koswatta, Mariana Bertoni, Zachary Holman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations


With high quality silicon wafers nowadays available at a low cost, further technology improvement relies on the development of inexpensive and highly efficient carrier-selective contacts (CSC). To this respect, evaporated MoOx hole-selective contacts recently brought some attention due to impressive transparency and carrier selectivity properties, and other materials are widely studied in other photovoltaics technologies (TiO2, WO3, V2O5, ... ). Compared to standard heterojunction devices using amorphous silicon as passivating layer and CSC, reported efficiencies for devices using evaporated MoOx layers still fall short due to carrier extraction or recombination issues. Whereas little room for maneuver is foreseen to tune the properties of evaporated metal oxide layers, reactive sputtering on the other hand is expected to allow manipulating the work-function of metal oxides. We will review in this presentation the potential of using reactively sputtered metal-oxides as CSC in c-Si solar cells. Preliminary results obtained with MoOx indicate that decreasing the oxidation state of the layer yields better transport properties but poorer selectivity. Also, though a drastic drop in lifetime was observed after sputtering a MoOx layer on a passivating a-Si layer, annealing enabled a recovery of most of the lifetime

Original languageEnglish (US)
Title of host publication2015 IEEE 42nd Photovoltaic Specialist Conference, PVSC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479979448
StatePublished - Dec 14 2015
Event42nd IEEE Photovoltaic Specialist Conference, PVSC 2015 - New Orleans, United States
Duration: Jun 14 2015Jun 19 2015


Other42nd IEEE Photovoltaic Specialist Conference, PVSC 2015
Country/TerritoryUnited States
CityNew Orleans


  • carrier-selective contacts
  • metal oxide
  • selectivity
  • silicon solar cells

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials


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