Epitaxial strontium titanate films grown by atomic layer deposition on SrTiO3-buffered Si(001) substrates

Martin D. McDaniel, Agham Posadas, Thong Q. Ngo, Ajit Dhamdhere, David Smith, Alexander A. Demkov, John G. Ekerdt

Research output: Contribution to journalArticlepeer-review

40 Scopus citations

Fingerprint

Dive into the research topics of 'Epitaxial strontium titanate films grown by atomic layer deposition on SrTiO<sub>3</sub>-buffered Si(001) substrates'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds