Epitaxial Oxides on Glass: A Platform for Integrated Oxide Devices

J. Elliott Ortmann, Martha R. McCartney, Agham Posadas, David Smith, Alexander A. Demkov

Research output: Contribution to journalArticle

Abstract

The fabrication of epitaxial, ultrathin SrTiO3 (STO) on thick SiO2 without the need for complicated wafer-bonding processes has been demonstrated. The resulting transition metal oxide (TMO)-on-glass layer stack is analogous to traditional silicon-on-insulator (SOI) wafers, where the crystalline device silicon layer of SOI has been replaced by a crystalline functional TMO layer. Fabrication starts with ultrathin body SOI on which crystalline STO is grown epitaxially by molecular beam epitaxy. The device silicon layer is subsequently fully oxidized by ex situ high-temperature dry O2 annealing, as confirmed by X-ray photoelectron spectroscopy, X-ray reflectivity, and high-resolution electron microscopy. STO maintains its epitaxial registry to the carrier silicon substrate after annealing, and no evidence for degradation of the STO crystalline quality as a result of the TMO-on-glass fabrication process is observed. The ease of fabricating the TMO-on-glass platform without the need for wafer bonding will enable rapid progress in the development of state-of-the-art TMO-based electronic and photonic devices.

Original languageEnglish (US)
JournalACS Applied Nano Materials
DOIs
StateAccepted/In press - Jan 1 2019

Fingerprint

Silicon
Oxides
Transition metals
Glass
Crystalline materials
Wafer bonding
Fabrication
Annealing
Photonic devices
High resolution electron microscopy
Molecular beam epitaxy
X ray photoelectron spectroscopy
Degradation
X rays
strontium titanium oxide
Substrates

Keywords

  • integrated photonics
  • MBE
  • SOI
  • STO
  • thin film
  • transition metal oxide

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Epitaxial Oxides on Glass : A Platform for Integrated Oxide Devices. / Ortmann, J. Elliott; McCartney, Martha R.; Posadas, Agham; Smith, David; Demkov, Alexander A.

In: ACS Applied Nano Materials, 01.01.2019.

Research output: Contribution to journalArticle

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