Epitaxial growth of barium titanate thin films on germanium via atomic layer deposition

Engineering & Materials Science

• Barium titanate 100%
• Atomic layer deposition 96%
• Epitaxial growth 88%
• Germanium 84%
• Thin films 59%
• Crystalline materials 44%
• Germanium oxides 43%
• Amorphous films 34%
• Epitaxial films 31%
• Dimers 31%
• Electron diffraction 27%
• Heterojunctions 27%
• Atoms 21%
• Transmission electron microscopy 21%
• Annealing 20%
• X ray diffraction 20%
• Scanning electron microscopy 16%
• Temperature 8%

Physics & Astronomy

• barium titanates 70%
• atomic layer epitaxy 65%
• germanium 55%
• thin films 32%
• germanium oxides 18%
• troughs 14%
• epitaxy 12%
• dimers 11%
• electron diffraction 10%
• transmission electron microscopy 8%
• scanning electron microscopy 8%
• annealing 7%
• diffraction 6%
• atoms 6%
• x rays 5%

Chemical Compounds

• Epitaxial Growth 76%
• Atomic Layer Epitaxy 72%
• Liquid Film 30%
• Amorphous Film 21%
• Scanning Transmission Electron Microscopy 18%
• Electron Diffraction 16%
• Surface 15%
• Annealing 12%
• Oxide 8%
• X-Ray Diffraction 7%