Enhanced adhesion of copper films to SiO 2, PSG and BPSG by refractory metal additions

S. A. Rafalski, R. L. Spreitzer, S. W. Russell, Terry Alford, J. Li, M. Moinpour, F. Moghadam, J. W. Mayer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

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Chemical Compounds

Engineering & Materials Science