ENERGY LOSS ANALYSIS OF OXYGEN MICROPRECIPITATES IN SILICON.

I. Y T Chan, Ray Carpenter, C. J. Varker, L. Chang, L. J. Demer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - Electron Microscopy Society of America
PublisherClaitor's Publ Div
Pages500-501
Number of pages2
Publication statusPublished - 1982
Externally publishedYes

    Fingerprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Chan, I. Y. T., Carpenter, R., Varker, C. J., Chang, L., & Demer, L. J. (1982). ENERGY LOSS ANALYSIS OF OXYGEN MICROPRECIPITATES IN SILICON. In Proceedings - Electron Microscopy Society of America (pp. 500-501). Claitor's Publ Div.