ENERGY LOSS ANALYSIS OF OXYGEN MICROPRECIPITATES IN SILICON.

I. Y T Chan, Ray Carpenter, C. J. Varker, L. Chang, L. J. Demer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - Electron Microscopy Society of America
PublisherClaitor's Publ Div
Pages500-501
Number of pages2
StatePublished - 1982
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering

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