Energy filtered reflection electron microscopy and reflection high-energy electron diffraction on Zeiss 912 TEM

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The chromatic aberrations of the objective lens cause the degradation of the image contrast and resolution in REM. In order to improve the resolution and contrast, energy filters were incorporated in the TEM. Presented in this article is the new results on the study of resolution limit and contrast mechanisms in energy filtered REM images. The investigations were done on Zeiss 912 TEM equipped with an Omega magnetic imaging energy filter.

Original languageEnglish (US)
Title of host publicationProceedings - Annual Meeting, Microscopy Society of America
PublisherPubl by San Francisco Press Inc
Pages580-581
Number of pages2
StatePublished - 1993
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: Aug 1 1993Aug 6 1993

Other

OtherProceedings of the 51st Annual Meeting Microscopy Society of America
CityCincinnati, OH, USA
Period8/1/938/6/93

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Liu, J. (1993). Energy filtered reflection electron microscopy and reflection high-energy electron diffraction on Zeiss 912 TEM. In Proceedings - Annual Meeting, Microscopy Society of America (pp. 580-581). Publ by San Francisco Press Inc.