Energy enhancement and chaos control in microelectromechanical systems

Kwangho Park, Qingfei Chen, Ying-Cheng Lai

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

Original languageEnglish (US)
Article number026210
JournalPhysical Review E - Statistical, Nonlinear, and Soft Matter Physics
Volume77
Issue number2
DOIs
StatePublished - Feb 12 2008

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Chaos Control
Resonator
Micro-electro-mechanical Systems
microelectromechanical systems
chaos
Enhancement
resonators
augmentation
Energy
Oscillation
Mars Excursion Module
electrostatics
Electrostatic Force
oscillations
Periodic Motion
Electrostatics
Nonlinear Dynamics
Convert
energy
Control Strategy

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics
  • Statistical and Nonlinear Physics
  • Mathematical Physics

Cite this

Energy enhancement and chaos control in microelectromechanical systems. / Park, Kwangho; Chen, Qingfei; Lai, Ying-Cheng.

In: Physical Review E - Statistical, Nonlinear, and Soft Matter Physics, Vol. 77, No. 2, 026210, 12.02.2008.

Research output: Contribution to journalArticle

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