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Energy deposition in thin films calculated using electron transport theory
Theodore Biewer, Peter Rez
Physics
Research output
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Contribution to journal
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Article
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peer-review
5
Scopus citations
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Physics & Astronomy
transport theory
100%
thin films
42%
electrons
35%
energy
24%
carbon
18%
stopping power
15%
scattering cross sections
14%
low voltage
13%
elastic scattering
12%
estimating
12%
inelastic scattering
12%
projection
11%
damage
9%
microscopy
9%
scanning electron microscopy
9%
cross sections
8%
curves
7%