Abstract
We show that a composition image that is independent of thickness can be obtained by suitably combining the phase and amplitude images extracted from an off-axis electron hologram. This image is the product of the mean inner potential of the material and the mean-free-path for inelastic scattering. The method used has been evaluated using single crystal Si wedges with known linearly increasing thickness, and it has then been applied to CoSi2/Si epitaxial interfaces with unknown thickness. Thickness independent images of Si show constant contrast while images of hetero interface emphasize compositional differences.
Original language | English (US) |
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Pages (from-to) | 291-296 |
Number of pages | 6 |
Journal | Ultramicroscopy |
Volume | 53 |
Issue number | 3 |
DOIs | |
State | Published - Mar 1994 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation