Electron nanodiffraction using sharply focused parallel probes

Christian Dwyer, Angus I. Kirkland, Peter Hartel, Heiko Müller, Maximilian Haider

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22 Scopus citations

Abstract

The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.

Original languageEnglish (US)
Article number151104
JournalApplied Physics Letters
Volume90
Issue number15
DOIs
StatePublished - Apr 24 2007
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Dwyer, C., Kirkland, A. I., Hartel, P., Müller, H., & Haider, M. (2007). Electron nanodiffraction using sharply focused parallel probes. Applied Physics Letters, 90(15), [151104]. https://doi.org/10.1063/1.2721120