Electron nanodiffraction using sharply focused parallel probes

Christian Dwyer, Angus I. Kirkland, Peter Hartel, Heiko Müller, Maximilian Haider

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

The authors describe an electron-optical configuration for producing a nanometer-scale sharply focused parallel electron probe in the transmission electron microscope. The configuration utilizes one of the round lenses in an objective prefield aberration corrector and generates a sharply focused parallel probe of 10 nm in diameter, with better than 0.2 nm edge acuity. Such a probe makes it possible to obtain electron diffraction patterns from nanometer-scale volumes of the specimen with unprecedented precision. A method for measuring the transverse coherence of the probe is also described.

Original languageEnglish (US)
Article number151104
JournalApplied Physics Letters
Volume90
Issue number15
DOIs
StatePublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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