Electron-impact dissociation cross sections for CHF3 and C 3F8

J. E. Baio, Hongbin Yu, D. W. Flaherty, H. F. Winters, D. B. Graves

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Absolute total dissociation cross sections, σt,diss, by electron-impact are reported for CHF3 and C3F8 from 10 to 300 eV using the chemical gettering technique described by Winters and Inokuti (1982 Phys. Rev. A 25 1420). Data are concentrated in the near-threshold region (10-30 eV). The thresholds for dissociation of CHF 3 and C3F8 are determined to be 10.4 eV and 11.9 eV, respectively. Ionization thresholds occur at 16 eV for CHF3 and 16.2 eV for C3F8. Neutral dissociation cross sections of both CHF3 and C3F8 are obtained by subtracting the ionization cross sections, σt,ion, from the total dissociation cross sections, σt,diss.

Original languageEnglish (US)
Pages (from-to)6969-6974
Number of pages6
JournalJournal of Physics D: Applied Physics
Volume40
Issue number22
DOIs
StatePublished - Nov 21 2007
Externally publishedYes

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electron impact
dissociation
Electrons
cross sections
Ionization
thresholds
ionization cross sections
winter
Ions
ionization
fluoroform
ions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Electron-impact dissociation cross sections for CHF3 and C 3F8 . / Baio, J. E.; Yu, Hongbin; Flaherty, D. W.; Winters, H. F.; Graves, D. B.

In: Journal of Physics D: Applied Physics, Vol. 40, No. 22, 21.11.2007, p. 6969-6974.

Research output: Contribution to journalArticle

Baio, J. E. ; Yu, Hongbin ; Flaherty, D. W. ; Winters, H. F. ; Graves, D. B. / Electron-impact dissociation cross sections for CHF3 and C 3F8 In: Journal of Physics D: Applied Physics. 2007 ; Vol. 40, No. 22. pp. 6969-6974.
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