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Electron holographic characterization of nanoscale charge distributions for ultra shallow PN junctions in Si
P. S. Chakraborty, Martha McCartney, J. Li, C. Gopalan, U. Singisetti, Stephen Goodnick, Trevor Thornton, Michael Kozicki
- CLAS-NS: Physics
- CLAS-NS: Solid State Science, LeRoy Eyring Center for (CSSS)
- IAFSE-SEMTE: Materials Science and Engineering
- IAFSE-ECEE: Electrical Engineering
- IAFSE-ECEE: Solid State Electronics Research Center (CSSER)
- Engineering, Ira A. Fulton Schools of (IAFSE)
- Knowledge Enterprise (KE)
- Biodesign Institute
- IAFSE-ECEE: Connection One (C1)
- AINE: Applied Nanoionics, Center for (CANi)
Research output: Contribution to journal › Conference article › peer-review
5
Scopus
citations