Electron holographic characterization of nanoscale charge distributions for ultra shallow PN junctions in Si

Engineering & Materials Science

• Electron holography 100%
• Charge distribution 96%
• Doping (additives) 74%
• Electrons 66%
• Secondary ion mass spectrometry 66%
• Electric fields 40%
• Single electron transistors 35%
• Thermal diffusion 30%
• Electric space charge 29%
• Electron microscopes 20%
• Chemical activation 19%
• Derivatives 18%
• Substrates 15%

Physics & Astronomy

• charge distribution 66%
• characterization 37%
• profiles 28%
• electrons 28%
• p-n junctions 27%
• secondary ion mass spectrometry 27%
• holography 25%
• single electron transistors 17%
• electric fields 15%
• thermal diffusion 14%
• space charge 11%
• activation 10%
• electron microscopes 10%
• field effect transistors 10%
• quantum dots 10%
• estimates 7%

Chemical Compounds

• Electron Particle 36%
• Doping Material 35%
• Secondary Ion Mass Spectroscopy 28%
• Electric Field 23%
• Thermal Diffusion 17%
• Space Charge 17%
• Quantum Dot 11%
• Surface 4%