Electron diffraction in UHV SEM, REM, and TEM

J. A. Venables, C. J. Harland, Peter Bennett, T. E A Zerrouk

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Electron diffraction techniques are widely used in Surface Science, with the main aim of determining atomic positions in surface reconstruction and the location of absorbed atoms. These require an Ultra-high vacuum (UHV) environment. The use of a focussed beam in UHV electron microscopes in principle allows such techniques to be applied on a microscopic scale. Several reflection (REM) and scanning (SEM) instruments have been built with energies between 5 and 100 keV. In general, the addition of RHEED to an UHV-SEM with Auger Electron Spectroscopy (AES) forms a very useful tool in Surface Science.

Original languageEnglish (US)
Title of host publicationProceedings - Annual Meeting, Microscopy Society of America
EditorsG.W. Bailey, A.J. Garratt-Reed
Number of pages2
StatePublished - 1994
Externally publishedYes
EventProceedings of the 52nd Annual Meeting of the Microscopy Society of America - New Orleans, LA, USA
Duration: Jul 31 1994Aug 5 1994


OtherProceedings of the 52nd Annual Meeting of the Microscopy Society of America
CityNew Orleans, LA, USA

ASJC Scopus subject areas

  • Engineering(all)


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