Electron beam induced charging of focused ion beam milled semiconductor transistors examined using electron holography

T. Kasama, R. E. Dunin-Borkowski, S. B. Newcomb, Martha McCartney

Research output: Contribution to journalArticle

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)988-989
Number of pages2
JournalMicroscopy and Microanalysis
Volume10
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2004

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ASJC Scopus subject areas

  • Instrumentation

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