ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Institute of Physics Conference Series
Publisher	Inst of Physics
Pages	137-142
Number of pages	6
Edition	67
ISBN (Print)	0854981586
State	Published - 1983
Externally published	Yes

Name	Institute of Physics Conference Series
Number	67
ISSN (Print)	0373-0751

ASJC Scopus subject areas

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title = "ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON.",

author = "Kozicki, {M. N.} and Robertson, {J. M.}",

year = "1983",

language = "English (US)",

isbn = "0854981586",

series = "Institute of Physics Conference Series",

publisher = "Inst of Physics",

number = "67",

pages = "137--142",

booktitle = "Institute of Physics Conference Series",

edition = "67",

}

TY - GEN

T1 - ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON.

AU - Kozicki, M. N.

AU - Robertson, J. M.

PY - 1983

Y1 - 1983

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M3 - Conference contribution

AN - SCOPUS:0020945433

SN - 0854981586

T3 - Institute of Physics Conference Series

SP - 137

EP - 142

BT - Institute of Physics Conference Series

PB - Inst of Physics

ER -