ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON.

M. N. Kozicki, J. M. Robertson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
PublisherInst of Physics
Pages137-142
Number of pages6
Edition67
ISBN (Print)0854981586
StatePublished - Dec 1 1983

Publication series

NameInstitute of Physics Conference Series
Number67
ISSN (Print)0373-0751

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Kozicki, M. N., & Robertson, J. M. (1983). ELECTRON-BEAM ANNEALING OF Co AND Cr IMPLANTED POLYCRYSTALLINE SILICON. In Institute of Physics Conference Series (67 ed., pp. 137-142). (Institute of Physics Conference Series; No. 67). Inst of Physics.