Electrodeposition of low-resistivity Y-doped ZnO and its thermal stability

X. Han, M. Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Y-doped ZnO films have been electrochemically deposited on ITO-coated glass and Ag-coated stainless steel substrates. Without Y doping, the sheet resistance of the ZnO/ITO stack is 6.8 kΩ/sq. After adding a Y precursor to the deposition solution, the sheet resistance of the ZnO/ITO stack is reduced to as low as 1.5 Ω/sq, measured by four-point probe. This sheet resistance is obtained after annealing the 400-nm Y-doped ZnO film on ITO in 1 ATM N2 ambient at 300 °C for 3 hours. The corresponding resistivity for the ZnO film is 6.3×10-5 Ω-cm, extracted by considering the ZnO/ITO stack as a parallel circuit. Even with possible measurement errors considered, the corresponding resistivity is only 1×10-4 Ω-cm. The low-resistivity Y-doped ZnO also shows high transmittance (above 80%) and low absorbance (below 10%) by UV-vis spectroscopy. Y-doped ZnO deposited on Ag-coated stainless steel substrates shows stable resistivity (1×10-4 Ω-cm) and high reflectance (∼60%) after annealing in 1 ATM N2 ambient at 500 °C for 1 hour.

Original languageEnglish (US)
Title of host publicationProgram - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010
Pages305-310
Number of pages6
DOIs
StatePublished - Dec 20 2010
Externally publishedYes
Event35th IEEE Photovoltaic Specialists Conference, PVSC 2010 - Honolulu, HI, United States
Duration: Jun 20 2010Jun 25 2010

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371

Other

Other35th IEEE Photovoltaic Specialists Conference, PVSC 2010
CountryUnited States
CityHonolulu, HI
Period6/20/106/25/10

    Fingerprint

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Han, X., & Tao, M. (2010). Electrodeposition of low-resistivity Y-doped ZnO and its thermal stability. In Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010 (pp. 305-310). [5615911] (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2010.5615911