TY - GEN
T1 - Electrically tunable and temperature compensated FBAR
AU - Pang, Wei
AU - Yu, Hongyu
AU - Zhang, Hao
AU - Kim, Eun Sok
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2005
Y1 - 2005
N2 - This paper describes the design, fabrication and measurement of an electrically tunable, temperature compensated film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. About 0.9% tuning (Δf ≅26 MHz) of the series resonant frequency at 2.8 GHz has been obtained with less than 10 V. This is the highest frequency tuning reported for FBAR operating above 1GHz without any extra power consumption. Moreover, the air-gap capacitor (that forms the MEMS actuator) passively reduces the FBAR's temperature coefficient of frequency (TCF) by about 40 ppm/°C.
AB - This paper describes the design, fabrication and measurement of an electrically tunable, temperature compensated film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. About 0.9% tuning (Δf ≅26 MHz) of the series resonant frequency at 2.8 GHz has been obtained with less than 10 V. This is the highest frequency tuning reported for FBAR operating above 1GHz without any extra power consumption. Moreover, the air-gap capacitor (that forms the MEMS actuator) passively reduces the FBAR's temperature coefficient of frequency (TCF) by about 40 ppm/°C.
KW - Electrical tuning
KW - FBAR
KW - Surface micromachined tunable capacitor
KW - Temperature compensation
UR - http://www.scopus.com/inward/record.url?scp=33749250033&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33749250033&partnerID=8YFLogxK
U2 - 10.1109/MWSYM.2005.1516911
DO - 10.1109/MWSYM.2005.1516911
M3 - Conference contribution
AN - SCOPUS:33749250033
SN - 0780388461
SN - 9780780388468
T3 - IEEE MTT-S International Microwave Symposium Digest
SP - 1279
EP - 1282
BT - 2005 IEEE MTT-S International Microwave Symposium Digest
T2 - 2005 IEEE MTT-S International Microwave Symposium
Y2 - 12 June 2005 through 17 June 2005
ER -