Electrically tunable and switchable film bulk acousitc resonator

Wei Pang, Hao Zhang, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

This paper describes an electrically tunable and switchable film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. Around ∼0.8% tuning of the series resonant frequency (Δf ≅18MHz) at 2.3 GHz is experimentally obtained with an electrostatic actuation voltage varying between 12.2 and 27.5V. Also, switchable resonator with Q (quality) factor of greater than 100 at 2.2 and 4.0 GHz is experimentally demonstrated in a compact device area.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Frequency Control Symposium and Exposition
EditorsM.P. Yuhas
Pages22-26
Number of pages5
StatePublished - 2005
Externally publishedYes
Event2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada
Duration: Aug 23 2004Aug 27 2004

Other

Other2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S)
CountryCanada
CityMontreal
Period8/23/048/27/04

Fingerprint

Acoustic resonators
Resonators
Electrostatics
MEMS
Natural frequencies
Actuators
Tuning
Electric potential

Keywords

  • Electrical tuning
  • FBAR
  • Mems actuator
  • Switchable resonator

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Pang, W., Zhang, H., Yu, H., & Kim, E. S. (2005). Electrically tunable and switchable film bulk acousitc resonator. In M. P. Yuhas (Ed.), Proceedings of the IEEE International Frequency Control Symposium and Exposition (pp. 22-26). [FC2-A-3]

Electrically tunable and switchable film bulk acousitc resonator. / Pang, Wei; Zhang, Hao; Yu, Hongyu; Kim, Eun Sok.

Proceedings of the IEEE International Frequency Control Symposium and Exposition. ed. / M.P. Yuhas. 2005. p. 22-26 FC2-A-3.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pang, W, Zhang, H, Yu, H & Kim, ES 2005, Electrically tunable and switchable film bulk acousitc resonator. in MP Yuhas (ed.), Proceedings of the IEEE International Frequency Control Symposium and Exposition., FC2-A-3, pp. 22-26, 2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S), Montreal, Canada, 8/23/04.
Pang W, Zhang H, Yu H, Kim ES. Electrically tunable and switchable film bulk acousitc resonator. In Yuhas MP, editor, Proceedings of the IEEE International Frequency Control Symposium and Exposition. 2005. p. 22-26. FC2-A-3
Pang, Wei ; Zhang, Hao ; Yu, Hongyu ; Kim, Eun Sok. / Electrically tunable and switchable film bulk acousitc resonator. Proceedings of the IEEE International Frequency Control Symposium and Exposition. editor / M.P. Yuhas. 2005. pp. 22-26
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