Electrically tunable and switchable film bulk acousitc resonator

Wei Pang, Hao Zhang, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

This paper describes an electrically tunable and switchable film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. Around ∼0.8% tuning of the series resonant frequency (Δf ≅18MHz) at 2.3 GHz is experimentally obtained with an electrostatic actuation voltage varying between 12.2 and 27.5V. Also, switchable resonator with Q (quality) factor of greater than 100 at 2.2 and 4.0 GHz is experimentally demonstrated in a compact device area.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Frequency Control Symposium and Exposition
EditorsM.P. Yuhas
Pages22-26
Number of pages5
StatePublished - 2005
Externally publishedYes
Event2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada
Duration: Aug 23 2004Aug 27 2004

Other

Other2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S)
CountryCanada
CityMontreal
Period8/23/048/27/04

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Keywords

  • Electrical tuning
  • FBAR
  • Mems actuator
  • Switchable resonator

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Pang, W., Zhang, H., Yu, H., & Kim, E. S. (2005). Electrically tunable and switchable film bulk acousitc resonator. In M. P. Yuhas (Ed.), Proceedings of the IEEE International Frequency Control Symposium and Exposition (pp. 22-26). [FC2-A-3]