Abstract
Stretchable electronics need stretchable wiring membranes that are equivalent to printed wiring boards but with elastically stretchable insulators and multilevel metallization. We have developed technology for elastically stretchable two-level metallization on an elastomeric membrane. Two levels of conductors were separated by a photopatternable elastomeric dielectric and connected through via holes. They were evaluated at uniaxial tensile strains of up to 30% and then used to create an elastomeric resistor-inductor-capacitor (RLC) circuit, whose alternating-current (AC) response was measured at biaxial tensile strains of up to 6%. We describe the fabrication process, morphology, and electrical performance of the bilevel metallization and the RLC circuit.
Original language | English (US) |
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Pages (from-to) | 1335-1344 |
Number of pages | 10 |
Journal | Journal of Electronic Materials |
Volume | 40 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2011 |
Keywords
- Thin film
- bilevel conductors
- resonant circuit
- stretchable conductors
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Electrical and Electronic Engineering