Elastically stretchable insulation and bilevel metallization and its application in a stretchable RLC circuit

J. Harris, Oliver Graudejus, S. Wagner

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Stretchable electronics need stretchable wiring membranes that are equivalent to printed wiring boards but with elastically stretchable insulators and multilevel metallization. We have developed technology for elastically stretchable two-level metallization on an elastomeric membrane. Two levels of conductors were separated by a photopatternable elastomeric dielectric and connected through via holes. They were evaluated at uniaxial tensile strains of up to 30% and then used to create an elastomeric resistor-inductor-capacitor (RLC) circuit, whose alternating-current (AC) response was measured at biaxial tensile strains of up to 6%. We describe the fabrication process, morphology, and electrical performance of the bilevel metallization and the RLC circuit.

Original languageEnglish (US)
Pages (from-to)1335-1344
Number of pages10
JournalJournal of Electronic Materials
Volume40
Issue number6
DOIs
StatePublished - Jun 2011

Keywords

  • Thin film
  • bilevel conductors
  • resonant circuit
  • stretchable conductors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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