Effects of ion irradiation on thermally formed silicides in the presence of interfacial oxide

C. D. Lien, M. A. Nicolet, Peter Williams

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint Dive into the research topics of 'Effects of ion irradiation on thermally formed silicides in the presence of interfacial oxide'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy