Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene napthalate substrates deposited by radio frequency magnetron sputtering

S. K. Bhagat, H. Han, Y. Zoo, J. Lewis, S. Grego, K. Lee, S. Iyer, Terry Alford

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The mechanical and electrical properties of indium tin oxide films on polyethylene naphthalate substrates are critical to the development of flexible displays. In the present study, mechanical and electrical properties are studied as a function of processing conditions, including radio frequency (rf) power, substrate temperature, and substrate plasma treatment. The results show that substrate temperature has the largest impact on mechanical performance. The best electrical performance is obtained from high substrate temperature and high rf power, while the best mechanical performance is obtained from high substrate temperature and low rf power. Plasma treatment gases influence electrical and mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides better initial understanding of the relationship between sputter process conditions and film properties and their influence on electrical and mechanical performance.

Original languageEnglish (US)
Pages (from-to)4064-4069
Number of pages6
JournalThin Solid Films
Volume516
Issue number12
DOIs
StatePublished - Apr 30 2008

Fingerprint

Polyethylene
Tin oxides
indium oxides
Magnetron sputtering
Indium
tin oxides
Oxide films
oxide films
Polyethylenes
polyethylenes
radio frequencies
magnetron sputtering
Electric properties
electrical properties
mechanical properties
Mechanical properties
Substrates
Gases
Flexible displays
Plasmas

Keywords

  • Flexible substrates
  • Indium tin oxide
  • Mechanical properties
  • Polyethylene napthalate
  • Resistivity

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Effects of deposition parameters on the electrical and mechanical properties of indium tin oxide films on polyethylene napthalate substrates deposited by radio frequency magnetron sputtering. / Bhagat, S. K.; Han, H.; Zoo, Y.; Lewis, J.; Grego, S.; Lee, K.; Iyer, S.; Alford, Terry.

In: Thin Solid Films, Vol. 516, No. 12, 30.04.2008, p. 4064-4069.

Research output: Contribution to journalArticle

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AU - Grego, S.

AU - Lee, K.

AU - Iyer, S.

AU - Alford, Terry

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