Effect of substrate growth temperatures on H diffusion in hydrogenated Si/Si homoepitaxial structures grown by molecular beam epitaxy

Lin Shao, J. K. Lee, Y. Q. Wang, M. Nastasi, Phillip E. Thompson, N. David Theodore, Terry Alford, J. W. Mayer, Peng Chen, S. S. Lau

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

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Physics & Astronomy