Abstract
The origin and characteristics of the defect structures in contemporary SIMOX are described here and how their densities are controlled by the processing method and conditions. The three defect types in SIMOX which are through-thickness defect pairs, partial-thickness defects, and at the buried oxide interface, stacking fault pyramids, occur in both multiple and single implant material.
Original language | English (US) |
---|---|
Title of host publication | IEEE International SOI Conference |
Place of Publication | Piscataway, NJ, United States |
Publisher | Publ by IEEE |
Pages | 48-49 |
Number of pages | 2 |
State | Published - 1993 |
Event | Proceedings of the IEEE International SOI Conference - Palm Springs, CA, USA Duration: Oct 5 1993 → Oct 7 1993 |
Other
Other | Proceedings of the IEEE International SOI Conference |
---|---|
City | Palm Springs, CA, USA |
Period | 10/5/93 → 10/7/93 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering