Effect of rapid thermal plus conventional annealing on the microstructure of oxygen implanted SOI material

Stephen Krause, B. L. Chen, M. K. El-Ghor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint Dive into the research topics of 'Effect of rapid thermal plus conventional annealing on the microstructure of oxygen implanted SOI material'. Together they form a unique fingerprint.

Engineering & Materials Science