Effect of molecular weight on poly(methyl methacrylate) resolution

Maroun Khoury; David K. Ferry

doi:10.1116/1.588437

Effect of molecular weight on poly(methyl methacrylate) resolution

Maroun Khoury, David K. Ferry

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

Abstract

Electron-beam lithography's resolution limit is greater than the beam diameter due to resist limitations as well as electron interaction with solids. We examine the effect of molecular weight on the resolution of poly(methyl methacrylate) (PMMA). The experimental procedure uses thin Si₃N₄ in order to reduce the backscattered electron contribution to the exposure, and the resist contrast standard deviation σ was determined. Molecular weights of 950×10³, 120×10³, and 15×10³ amu were used. It is found that relatively equivalent exposure and resolution are found in each case, and that the entanglement threshold is either lower than thought, or is not a factor in the resolution of PMMA. Lines as small as 7 nm are found in the highest molecular weight.

Original language	English (US)
Pages (from-to)	75-79
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	14
Issue number	1
DOIs	https://doi.org/10.1116/1.588437
State	Published - 1996

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.588437

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AB - Electron-beam lithography's resolution limit is greater than the beam diameter due to resist limitations as well as electron interaction with solids. We examine the effect of molecular weight on the resolution of poly(methyl methacrylate) (PMMA). The experimental procedure uses thin Si3N4 in order to reduce the backscattered electron contribution to the exposure, and the resist contrast standard deviation σ was determined. Molecular weights of 950×103, 120×103, and 15×103 amu were used. It is found that relatively equivalent exposure and resolution are found in each case, and that the entanglement threshold is either lower than thought, or is not a factor in the resolution of PMMA. Lines as small as 7 nm are found in the highest molecular weight.

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Effect of molecular weight on poly(methyl methacrylate) resolution

Abstract

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