Effect of la and y on crystallization temperatures of hafnia and zirconia

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66 Scopus citations

Abstract

Crystallization of amorphous Y- and La-doped HfO2 and ZrO2 nanophase powders was studied using thermal analysis and high-temperature x-ray diffraction. Substantial increase of crystallization temperature of amorphous hafnium and zirconium oxides could be achieved by alloying with La2O3. The crystallization temperature of Hf2La2O7 composition is higher than 900 °C, which makes it a candidate for advanced gate dielectrics. In contrast, Y-doping did not significantly raise the crystallization temperature.

Original languageEnglish (US)
Pages (from-to)693-696
Number of pages4
JournalJournal of Materials Research
Volume19
Issue number3
DOIs
StatePublished - Mar 2004
Externally publishedYes

Keywords

  • Amorphous
  • Dielectric properties
  • Differential thermal analysis (DTA)

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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