Effect of implantation energy on the defect formation in SIMOX

Sandeep Bagchi, J. D. Lee, Stephen Krause, P. Roitman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of implantation energy on the defect formation in SIMOX'. Together they form a unique fingerprint.

Engineering & Materials Science