Dynamics of vapor-phase organophosphates on silicon and OTS

Worakarn Neeyakorn, Manju Varma, Cherno Jaye, James E. Burnette, Sang M. Lee, Robert Nemanich, Christine S. Grant, Jacqueline Krim

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

Original languageEnglish (US)
Pages (from-to)269-276
Number of pages8
JournalTribology Letters
Volume27
Issue number3
DOIs
StatePublished - Sep 2007
Externally publishedYes

Fingerprint

Organophosphates
Silicon
Quartz crystal microbalances
Vapors
vapor phases
MEMS
silicon
Nanotribology
quartz crystals
microbalances
microelectromechanical systems
Viscoelasticity
Amorphous silicon
Thick films
Polysilicon
Monolayers
viscoelasticity
Phosphates
thick films
amorphous silicon

Keywords

  • Friction
  • Nanotribology
  • QCM
  • SAMS
  • Silicon
  • Vapor phase lubricants

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Neeyakorn, W., Varma, M., Jaye, C., Burnette, J. E., Lee, S. M., Nemanich, R., ... Krim, J. (2007). Dynamics of vapor-phase organophosphates on silicon and OTS. Tribology Letters, 27(3), 269-276. https://doi.org/10.1007/s11249-007-9224-y

Dynamics of vapor-phase organophosphates on silicon and OTS. / Neeyakorn, Worakarn; Varma, Manju; Jaye, Cherno; Burnette, James E.; Lee, Sang M.; Nemanich, Robert; Grant, Christine S.; Krim, Jacqueline.

In: Tribology Letters, Vol. 27, No. 3, 09.2007, p. 269-276.

Research output: Contribution to journalArticle

Neeyakorn, W, Varma, M, Jaye, C, Burnette, JE, Lee, SM, Nemanich, R, Grant, CS & Krim, J 2007, 'Dynamics of vapor-phase organophosphates on silicon and OTS', Tribology Letters, vol. 27, no. 3, pp. 269-276. https://doi.org/10.1007/s11249-007-9224-y
Neeyakorn, Worakarn ; Varma, Manju ; Jaye, Cherno ; Burnette, James E. ; Lee, Sang M. ; Nemanich, Robert ; Grant, Christine S. ; Krim, Jacqueline. / Dynamics of vapor-phase organophosphates on silicon and OTS. In: Tribology Letters. 2007 ; Vol. 27, No. 3. pp. 269-276.
@article{923e69bb221a478ea7ccbf2e52db36e4,
title = "Dynamics of vapor-phase organophosphates on silicon and OTS",
abstract = "We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.",
keywords = "Friction, Nanotribology, QCM, SAMS, Silicon, Vapor phase lubricants",
author = "Worakarn Neeyakorn and Manju Varma and Cherno Jaye and Burnette, {James E.} and Lee, {Sang M.} and Robert Nemanich and Grant, {Christine S.} and Jacqueline Krim",
year = "2007",
month = "9",
doi = "10.1007/s11249-007-9224-y",
language = "English (US)",
volume = "27",
pages = "269--276",
journal = "Tribology Letters",
issn = "1023-8883",
publisher = "Springer New York",
number = "3",

}

TY - JOUR

T1 - Dynamics of vapor-phase organophosphates on silicon and OTS

AU - Neeyakorn, Worakarn

AU - Varma, Manju

AU - Jaye, Cherno

AU - Burnette, James E.

AU - Lee, Sang M.

AU - Nemanich, Robert

AU - Grant, Christine S.

AU - Krim, Jacqueline

PY - 2007/9

Y1 - 2007/9

N2 - We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

AB - We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

KW - Friction

KW - Nanotribology

KW - QCM

KW - SAMS

KW - Silicon

KW - Vapor phase lubricants

UR - http://www.scopus.com/inward/record.url?scp=34547211720&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547211720&partnerID=8YFLogxK

U2 - 10.1007/s11249-007-9224-y

DO - 10.1007/s11249-007-9224-y

M3 - Article

AN - SCOPUS:34547211720

VL - 27

SP - 269

EP - 276

JO - Tribology Letters

JF - Tribology Letters

SN - 1023-8883

IS - 3

ER -