Dynamics of vapor-phase organophosphates on silicon and OTS

Worakarn Neeyakorn; Manju Varma; Cherno Jaye; James E. Burnette; Sang M. Lee; Robert J. Nemanich; Christine S. Grant; Jacqueline Krim

doi:10.1007/s11249-007-9224-y

Dynamics of vapor-phase organophosphates on silicon and OTS

Worakarn Neeyakorn, Manju Varma, Cherno Jaye, James E. Burnette, Sang M. Lee, Robert J. Nemanich, Christine S. Grant, Jacqueline Krim

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

Original language	English (US)
Pages (from-to)	269-276
Number of pages	8
Journal	Tribology Letters
Volume	27
Issue number	3
DOIs	https://doi.org/10.1007/s11249-007-9224-y
State	Published - Sep 2007
Externally published	Yes

Keywords

Friction
Nanotribology
QCM
SAMS
Silicon
Vapor phase lubricants

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1007/s11249-007-9224-y

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title = "Dynamics of vapor-phase organophosphates on silicon and OTS",

abstract = "We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.",

keywords = "Friction, Nanotribology, QCM, SAMS, Silicon, Vapor phase lubricants",

author = "Worakarn Neeyakorn and Manju Varma and Cherno Jaye and Burnette, {James E.} and Lee, {Sang M.} and Nemanich, {Robert J.} and Grant, {Christine S.} and Jacqueline Krim",

note = "Funding Information: Acknowledgments NSF CMS0087866/DMR0320743 and AFOSR Extreme Friction MURI F49620-01-1-0132/FA9550-04-1-0381 are gratefully acknowledged for supporting the work reported here.",

year = "2007",

month = sep,

doi = "10.1007/s11249-007-9224-y",

language = "English (US)",

volume = "27",

pages = "269--276",

journal = "Tribology Letters",

issn = "1023-8883",

publisher = "Springer New York",

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AU - Neeyakorn, Worakarn

AU - Varma, Manju

AU - Jaye, Cherno

AU - Burnette, James E.

AU - Lee, Sang M.

AU - Nemanich, Robert J.

AU - Grant, Christine S.

AU - Krim, Jacqueline

N1 - Funding Information: Acknowledgments NSF CMS0087866/DMR0320743 and AFOSR Extreme Friction MURI F49620-01-1-0132/FA9550-04-1-0381 are gratefully acknowledged for supporting the work reported here.

PY - 2007/9

Y1 - 2007/9

N2 - We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

AB - We have performed a quartz crystal microbalance (QCM) study of the uptake and nanotribology of organophosphate (tricresylphosphate (TCP) and t-butyl phenyl phosphate (TBPP)) layers adsorbed from the vapor phase onto amorphous and polycrystalline silicon and octadecyltrichlorosilane (OTS) treated silicon substrates. The materials were selected for their relevance to MEMS applications. About 3-5 monolayer-thick organophosphate films are observed to form readily on both silicon and OTS-treated silicon. The coatings moreover exhibit mobility in the form of interfacial slippage or viscoelasticity in response to the oscillatory motion of the QCM, implying that enhanced tribological performance may be expected in MEMS applications.

KW - Friction

KW - Nanotribology

KW - QCM

KW - SAMS

KW - Silicon

KW - Vapor phase lubricants

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U2 - 10.1007/s11249-007-9224-y

DO - 10.1007/s11249-007-9224-y

M3 - Article

AN - SCOPUS:34547211720

SN - 1023-8883

VL - 27

SP - 269

EP - 276

JO - Tribology Letters

JF - Tribology Letters

IS - 3

ER -

Dynamics of vapor-phase organophosphates on silicon and OTS

Abstract

Keywords

ASJC Scopus subject areas

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