Dynamics and control of the Czochralski process II. Objectives and control structure design

Michael A. Gevelber, George Stephanopoulos, Michael J. Wargo

Research output: Contribution to journalArticle

30 Scopus citations

Abstract

A new control system design is proposed for the Czochralski process in order to improve crystal quality, particularly GaAs. An expanded set of formal control objectives are proposed based on a considerations of defect formation, segregation, and the process coupling. A control structure is developed that meets the control objectives and the restrictions posed by the batch related disturbances, system coupling, and the dynamic characteristics of the measurements, outputs, and inputs.

Original languageEnglish (US)
Pages (from-to)199-217
Number of pages19
JournalJournal of Crystal Growth
Volume91
Issue number1-2
DOIs
StatePublished - Aug 1 1988
Externally publishedYes

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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