Dynamics and control of the Czochralski process II. Objectives and control structure design

Michael A. Gevelber; George Stephanopoulos; Michael J. Wargo

doi:10.1016/0022-0248(88)90386-7

Dynamics and control of the Czochralski process II. Objectives and control structure design

Michael A. Gevelber, George Stephanopoulos, Michael J. Wargo

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

A new control system design is proposed for the Czochralski process in order to improve crystal quality, particularly GaAs. An expanded set of formal control objectives are proposed based on a considerations of defect formation, segregation, and the process coupling. A control structure is developed that meets the control objectives and the restrictions posed by the batch related disturbances, system coupling, and the dynamic characteristics of the measurements, outputs, and inputs.

Original language	English (US)
Pages (from-to)	199-217
Number of pages	19
Journal	Journal of Crystal Growth
Volume	91
Issue number	1-2
DOIs	https://doi.org/10.1016/0022-0248(88)90386-7
State	Published - Aug 1 1988
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/0022-0248(88)90386-7

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abstract = "A new control system design is proposed for the Czochralski process in order to improve crystal quality, particularly GaAs. An expanded set of formal control objectives are proposed based on a considerations of defect formation, segregation, and the process coupling. A control structure is developed that meets the control objectives and the restrictions posed by the batch related disturbances, system coupling, and the dynamic characteristics of the measurements, outputs, and inputs.",

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Dynamics and control of the Czochralski process II. Objectives and control structure design

Abstract

ASJC Scopus subject areas

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