This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm -2 Hz -12.
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