Dynamic growth of carbon nanopillars and microrings in electron beam induced dissociation of residual hydrocarbons

Konrad Rykaczewski, Andrew Marshall, William B. White, Andrei G. Fedorov

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

Electron beam induced dissociation (EBID) of residual hydrocarbons is a common contamination problem in electron microscopy. Formation of amorphous carbon thin films, dots, rings, and complex three-dimensional (3D) structures has been documented. In recent years there has been a renewed interest in utilization EBID of residual hydrocarbons for nanomanufacturing and metrology. With the increase and the diversification of EBID applications, ability for an a priori prediction of the appropriate deposition settings (such as electron beam current, diameter, and energy) that would result in a desired deposit size and geometry is becoming increasingly important. Toward this end, we report how simulations can be used to quantitatively predict the complex shape and non-linear dynamics of secondary ring-type microstructures formed around nanopillar deposits. The deposition experiments were performed on a Si(1 0 0) substrate for different electron beam energies and currents. Deposit shape and transient evolution were characterized using atomic force microscopy and critically compared against simulations results.

Original languageEnglish (US)
Pages (from-to)989-992
Number of pages4
JournalUltramicroscopy
Volume108
Issue number9
DOIs
StatePublished - Aug 1 2008
Externally publishedYes

Keywords

  • Electron beam induced deposition
  • Microring and pillar deposit
  • Modeling
  • Residual hydrocarbons

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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