@article{9e312ce3a33c4ac6b9b95603b2a516f8,
title = "Downstream oxygen etching characteristics of polymers from the parylene family",
author = "Callahan, {Russell R A} and Pruden, {Kristin G.} and Gregory Raupp and Beaudoin, {Stephen P.}",
year = "2003",
doi = "10.1116/1.1591744",
language = "English (US)",
volume = "21",
pages = "1496--1500",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "4",
}