Downstream oxygen etching characteristics of polymers from the parylene family

Russell R A Callahan, Kristin G. Pruden, Gregory Raupp, Stephen P. Beaudoin

Research output: Contribution to journalArticlepeer-review

23 Scopus citations
Original languageEnglish (US)
Pages (from-to)1496-1500
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number4
DOIs
StatePublished - 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this