In order to extend our earlier work on in-Situ off-axis sputtering to larger areas, we have used two facing targets in the off-axis configuration to produce YBa2Cu307-o superconducting films with low microwave surface resistance on 5 em diameter LaAI03 substrates. Surface resistance (Rs) values at 10 GHz of 40±10 at 4.2 K and 400±100 at 77 K, superconducting transition temperatures of over 89 K and thickness variations of less than ±8% are uniformally obtained over the entire 5 cm diameter area. We also report a detailed characterization of the electronic and structural properties of the films produced on the LaAl03 substrates for a wide range of growth conditions. The role of YBCO microstructure on the transport properties and the effect of magnet geometry in the two sputter guns will also be discussed.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering