Double gun off-axis sputtering of large area Yba2Cu3O7-δ superconducting films for microwave applications

N. Newman; B. F. Cole; S. M. Garrison; K. Char; R. C. Taber

doi:10.1109/20.133417

Double gun off-axis sputtering of large area Yba2Cu3O7-δ superconducting films for microwave applications

N. Newman, B. F. Cole, S. M. Garrison, K. Char, R. C. Taber

Research output: Contribution to journal › Article › peer-review

56 Scopus citations

Abstract

In order to extend our earlier work on in-Situ off-axis sputtering to larger areas, we have used two facing targets in the off-axis configuration to produce YBa2Cu307-o superconducting films with low microwave surface resistance on 5 em diameter LaAI03 substrates. Surface resistance (Rs) values at 10 GHz of 40±10 at 4.2 K and 400±100 at 77 K, superconducting transition temperatures of over 89 K and thickness variations of less than ±8% are uniformally obtained over the entire 5 cm diameter area. We also report a detailed characterization of the electronic and structural properties of the films produced on the LaAl03 substrates for a wide range of growth conditions. The role of YBCO microstructure on the transport properties and the effect of magnet geometry in the two sputter guns will also be discussed.

Original language	English (US)
Pages (from-to)	1276-1279
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	27
Issue number	2
DOIs	https://doi.org/10.1109/20.133417
State	Published - Mar 1991
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/20.133417

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abstract = "In order to extend our earlier work on in-Situ off-axis sputtering to larger areas, we have used two facing targets in the off-axis configuration to produce YBa2Cu307-o superconducting films with low microwave surface resistance on 5 em diameter LaAI03 substrates. Surface resistance (Rs) values at 10 GHz of 40±10 at 4.2 K and 400±100 at 77 K, superconducting transition temperatures of over 89 K and thickness variations of less than ±8% are uniformally obtained over the entire 5 cm diameter area. We also report a detailed characterization of the electronic and structural properties of the films produced on the LaAl03 substrates for a wide range of growth conditions. The role of YBCO microstructure on the transport properties and the effect of magnet geometry in the two sputter guns will also be discussed.",

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AU - Cole, B. F.

AU - Garrison, S. M.

AU - Char, K.

AU - Taber, R. C.

PY - 1991/3

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Double gun off-axis sputtering of large area Yba2Cu3O7-δ superconducting films for microwave applications

Abstract

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