Double gun off-axis sputtering of large area YBa2Cu3O7-δ superconducting films for microwave applications

Nathan Newman, B. F. Cole, S. M. Garrison, K. Char, R. C. Taber

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

In order to extend earlier work on in-situ off-axis sputtering to larger areas, the authors used two facing targets in the off-axis configuration to produce YBa2Cu3O7-δ superconducting films with low microwave surface resistance on 5-cm-diameter LaAlO3 substrates. Surface resistance (Rs) values at 10 GHz of 40 ±10 μΩ at 4.2 K and 400 ±100 μΩ at 77 K, superconducting transition temperatures of over 89 K, and thickness variations of less than ±8% are uniformly obtained over the entire 5-cm-diameter area. The authors also report a detailed characterization of the electronic and structural properties of the films produced on the LaAlO3 substrates for a wide range of growth conditions. The influence of YBCO microstructure on the transport properties and the effect of magnet geometry in the two sputter guns are also discussed. It is concluded that in-situ off-axis sputtering from two facing targets can reproducibly fabricate very-high-quality YBCO films with low microwave surface resistance over large areas. The thickness uniformity over large areas is greatly enhanced over single-target sputtering by using this technique.

Original languageEnglish (US)
Pages (from-to)1276-1279
Number of pages4
JournalIEEE Transactions on Magnetics
Volume27
Issue number2 pt II
DOIs
StatePublished - Mar 1991
Externally publishedYes

Fingerprint

Surface resistance
Superconducting films
superconducting films
Sputtering
sputtering
Microwaves
microwaves
Substrates
Electronic properties
Transport properties
Superconducting transition temperature
Magnets
Structural properties
Microstructure
magnets
Geometry
transport properties
transition temperature
microstructure
barium copper yttrium oxide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Double gun off-axis sputtering of large area YBa2Cu3O7-δ superconducting films for microwave applications. / Newman, Nathan; Cole, B. F.; Garrison, S. M.; Char, K.; Taber, R. C.

In: IEEE Transactions on Magnetics, Vol. 27, No. 2 pt II, 03.1991, p. 1276-1279.

Research output: Contribution to journalArticle

Newman, Nathan ; Cole, B. F. ; Garrison, S. M. ; Char, K. ; Taber, R. C. / Double gun off-axis sputtering of large area YBa2Cu3O7-δ superconducting films for microwave applications. In: IEEE Transactions on Magnetics. 1991 ; Vol. 27, No. 2 pt II. pp. 1276-1279.
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