Abstract
Discrete-event simulation is a well-established and rather successful method in some semiconductor companies, while other companies do not use simulation at all. Simulation is used for performance assessment and decision-making. This paper focuses on the methodological and practical issues that have to be addressed to build, use, and maintain simulation models for a semiconductor wafer fabrication facility (wafer fab). We describe and discuss the main steps of a simulation study in this domain. We seek to highlight the main issues and present alternative ways to address them. Common pitfalls in using discrete-event simulation in semiconductor manufacturing and how they can be avoided are also discussed.
Original language | English (US) |
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Pages (from-to) | 661-682 |
Number of pages | 22 |
Journal | International Journal of Industrial Engineering : Theory Applications and Practice |
Volume | 22 |
Issue number | 5 |
State | Published - 2015 |
Keywords
- Discrete-event simulation
- Modeling issues
- Semiconductor manufacturing
- Tutorial
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering