Direct metal nano-patterning using embossed solid electrolyte

Engineering & Materials Science

• Nanoimprint lithography 100%
• Electron beam lithography 99%
• Solid electrolytes 91%
• Focused ion beams 89%
• Mechanical properties 41%
• Metals 41%

Physics & Astronomy

• solid electrolytes 77%
• lithography 53%
• embossing 43%
• metals 32%
• routes 26%
• conductors 26%
• ion beams 25%
• solid state 24%
• preparation 23%
• electron beams 23%
• mechanical properties 21%

Chemical Compounds

• Solid Electrolyte 64%
• Embossing 47%
• Ion Beam 35%
• Electron Beam 34%
• Conductor 32%
• Metal 28%
• Application 10%